A process in which radiation at optical
wavelengths (usually in the ultraviolet range) is passed through a mask,
and the resulting patterns are projected onto a layer of resist coating
the substrate material. |
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| Optical Mask |
A sheet of material carrying patterns that are
either transparent or opaque to the wavelengths used in an
optical-lithographic process. Such a mask can carry hundreds of
thousands of fine lines and geometric
shapes. |
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| Opto-Electronic |
Refers to a system which combines optical and
electronic components. |
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| Organic
Resist |
A material which is used to coat a substrate and
is then selectively cured to form an impervious layer. These materials
are called organic because they are based on carbon compounds as are
living creatures. |
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| Organic
Solvent |
A solvent for organic materials such as those
used to form organic resists. |
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| Organic
Substrate |
Substrate materials such as FR4, in
which woven glass fibers are bonded together with an epoxy. These
materials are called organic because epoxies are based on carbon
compounds as are living creatures. |
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| Overglassing |
One of the final stages in the integrated circuit
fabrication process in which the entire surface of the wafer is coated
with a layer of silicon dioxide or silicon nitride. This layer may also
be referred to as the barrier layer or the passivation layer. An
additional lithographic step is required to pattern holes in this layer
to allow connections to be made to the
pads.
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